Impact and cohabitation of Lithium on a microelectronics platform

Website CEA-LETI


Lithium-based materials, whether thin layers or bulk material, are of great interest for varied applications. However, their cohabitation with other “standard” materials for microelectronics may impede their development. Indeed, as a precaution, these materials are “confined” on dedicated manufacturing lines, without full knowledge of their potential effect on the manufactured devices. This work aims at understanding the phenomena leading to lithium dissemination, to propose solutions to keep it under control and to take advantage of beneficial effects.


During this Ph.D. thesis, you will work in close collaboration with a multidisciplinary team in CEA and with their partners. This will involve highlighting the vectors of Lithium dissemination in common manufacturing spaces in clean rooms. Furthermore, you will define a methodology to identify and quantify Lithium in various materials and at their interfaces using physicochemical characterisation tools, in particular ion beam analysis such as secondary ion mass spectrometry. This implementation will allow studying the mechanisms and kinetics of lithium diffusion as well as to evaluate its impact on the performance of “microelectronics” devices.


Chemist, physicist, engineer, etc., you have knowledge in chemistry/physics on materials/ semiconductors. Holder of a Bac+5, you are curious, rigorous, creative and wish to participate in a 3-year research project in support of microelectronics.



17 avenue des martyrs , 38054 Grenoble Cedex 9, France

Under the supervision of Eric de Vito and Vincent Thoréton


Eric de vito :[at]

Vincent Thoréton : vincent.thoreton[at]

thèse 2024 DPFT_Lithium diffusion